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Strips of width near 40 nm created in PMMA resist

A. Firsov
Application Center for Microengineering, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II, Berlin, Germany
Equipment: SEM LEO 1560, TSL laser interferometer controlled stage

Strips of width near 40 nm created in PMMA resist of 50 nm thickness for 25 kV accelerated voltage on balk Si substrate

Strips of width near 40 nm created in PMMA resist
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More images from Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II
(Click on image for close view)
Fragment of the last zones at the monochromator...
1. Fragment of the last zones at the monochromator...
System of lenses at the second monochromator...
2. System of lenses at the second monochromator...
A part of Bragg-Fresnel zone plate designed...
3. A part of Bragg-Fresnel zone plate designed...
Strips of width near 40 nm created in PMMA resist
4. Strips of width near 40 nm created in PMMA resist
Strips of 40 nm width in resist
5. Strips of 40 nm width in resist
A part of Bragg-Fresnel zone plate designed...
6. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate designed...
7. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate designed...
8. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate
9. A part of Bragg-Fresnel zone plate
Reflection Zone Plates for focusing X-rays
10. Reflection Zone Plates for focusing X-rays
A part of Bragg-Fresnel zone plate designed...
11. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate designed...
12. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate designed...
13. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate designed...
14. A part of Bragg-Fresnel zone plate designed...
                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                   
 
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