A part of Bragg-Fresnel zone plate designed for X-ray optics and spectroscopy

A. Firsov
Application Center for Microengineering, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II, Berlin, Germany
Equipment: SEM LEO 1560, TSL laser interferometer controlled stage

A part of Bragg-Fresnel zone plate designed for X-ray optics and spectroscopy. Pattern in PMMA resist of 50 nm thickness. Outer diameter of lens is 60 microns and outmost zone size is 40 nm. Writing time about 180 sec at 10 pA beam current, 140 uQ/cm² resist sensitivity and 3.5 usec/per point dwell time.

More images from other authors

G.Goltsman, K. Smirnov, N.Kaurova et al.; MSPU Superconducting Hot-Electron Bolometer Mixer for Terahertz Heterodyne Receivers...

J. Kouba; Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II Hexagonal lattice type photonic crystal in S3N4...

V. Gurtovoi, A. Firsov; IMT RAS Quantum state detector...

A. Nashchekin, E. Arakcheeva, E. Tanklevskaya; Ioffe Physico-Technical Institute RAS 2D PhC with CROW based on PhC defect superlattice for slowing light...

Y. Kasumov et al.; IMT RAS1 and ISSP RAS2 Selective growth of single-walled carbon nanotubes and fabrication of devices on their base...

Yu. Petrov, Prof. O. Vyvenko; St. Petersburg State University Site name written on a single thread-like GaAs crystal...

A. Vystavkin, A. Kuzmin, S. Shitov, A. Kovalenko, I. Kon, A. Uvarov, et al.; Institute of Radioengineering and Electronics (IRE) of RAS Single receiving element of superconducting terahertz hot-electron bolometer incorporated into a planar antenna...

М. Knyazev, V. Starkov, D. Roshchupkin; IMT RAS "Deep" X-ray diffraction gratings based on Si (400) crystal...

E. Konstantinov, E. Demidov; Herzen State Pedagogical University Submicron bismuth (Bi) wires...

V. Gurtovoi2, V. Antonov1; Royal Holloway University1 Multiple superconducting ring ratchet...