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Strips of 40 nm width in resist

A. Firsov
Application Center for Microengineering, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II, Berlin, Germany
Equipment: SEM LEO 1560, TSL laser interferometer controlled stage

Fragment of outmost zones of Bragg-Fresnel zone plate. Strips of width near 40 nm created in PMMA resist of 50 nm thickness on balk Si substrate.

Strips of 40 nm width in resist
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More images from Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II
(Click on image for close view)
A part of Bragg-Fresnel zone plate designed...
1. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate designed...
2. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate
3. A part of Bragg-Fresnel zone plate
System of lenses at the second monochromator...
4. System of lenses at the second monochromator...
Strips of 40 nm width in resist
5. Strips of 40 nm width in resist
Fragment of the last zones at the monochromator...
6. Fragment of the last zones at the monochromator...
A part of Bragg-Fresnel zone plate designed...
7. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate designed...
8. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate designed...
9. A part of Bragg-Fresnel zone plate designed...
Strips of width near 40 nm created in PMMA resist
10. Strips of width near 40 nm created in PMMA resist
A part of Bragg-Fresnel zone plate designed...
11. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate designed...
12. A part of Bragg-Fresnel zone plate designed...
Reflection Zone Plates for focusing X-rays
13. Reflection Zone Plates for focusing X-rays
A part of Bragg-Fresnel zone plate designed...
14. A part of Bragg-Fresnel zone plate designed...
                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                   
 
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