A part of Bragg-Fresnel zone plate designed for X-ray optics and spectroscopy

A. Firsov
Application Center for Microengineering, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II, Berlin, Germany
Equipment: SEM LEO 1560, TSL laser interferometer controlled stage

A part of Bragg-Fresnel zone plate designed for X-ray optics and spectroscopy. Pattern in PMMA resist of 50 nm thickness. Outer diameter of lens is 60 microns and outmost zone size is 40 nm. Writing time about 180 sec at 10 pA beam current, 140 uQ/cm² resist sensitivity and 3.5 usec/per point dwell time.

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