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Fragment of the last zones at the monochromator crystal of 30 by 30 mm overall size.

A. Firsov
Application Center for Microengineering, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II, Berlin, Germany
Equipment: SEM LEO 1560, TSL laser interferometer controlled stage

Fragment of the last zones at the monochromator crystal of 30 by 30 mm overall size. Thickness of a gold phase shifting layer is equal to 150 nm.

Fragment of the last zones at the monochromator crystal of 30 by 30 mm overall size.
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More images from Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II
(Click on image for close view)
A part of Bragg-Fresnel zone plate designed...
1. A part of Bragg-Fresnel zone plate designed...
Fragment of the last zones at the monochromator...
2. Fragment of the last zones at the monochromator...
A part of Bragg-Fresnel zone plate designed...
3. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate designed...
4. A part of Bragg-Fresnel zone plate designed...
Strips of width near 40 nm created in PMMA resist
5. Strips of width near 40 nm created in PMMA resist
A part of Bragg-Fresnel zone plate designed...
6. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate designed...
7. A part of Bragg-Fresnel zone plate designed...
Strips of 40 nm width in resist
8. Strips of 40 nm width in resist
A part of Bragg-Fresnel zone plate
9. A part of Bragg-Fresnel zone plate
Reflection Zone Plates for focusing X-rays
10. Reflection Zone Plates for focusing X-rays
A part of Bragg-Fresnel zone plate designed...
11. A part of Bragg-Fresnel zone plate designed...
System of lenses at the second monochromator...
12. System of lenses at the second monochromator...
A part of Bragg-Fresnel zone plate designed...
13. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate designed...
14. A part of Bragg-Fresnel zone plate designed...
                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                   
 
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