Fragment of the last zones at the monochromator crystal of 30 by 30 mm overall size.
A. Firsov
Application Center for Microengineering,
Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II, Berlin, Germany
Equipment: SEM LEO 1560, TSL laser interferometer controlled stage
Fragment of the last zones at the
monochromator crystal of 30 by 30 mm overall size. Thickness of a gold phase shifting layer is equal to 150 nm.
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