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NanoMaker Products

Products

The NanoMaker can be shipped in a five different editions - Full, Workbench, Workbench-EDU, Writer, Editor.
For more information see the detailed list of features.
The Editor version is shareware and can be downloaded from our site.
For price information, please, contact our office.

Table below presents a feature matrix.

# Functions \ Product Name Full Workbench Workbench-EDU Writer Editor
Graphic Editor (specialized 2D/3D CAD)
  - Design of (hierarchical/multilayered) structures
  - Load/Save GraphicalDataBase (GDB) files
  - Import GDS,DXF,ELM,BMP,TIF formats
  - Export to GDS,DXF,ELM, DC2+RF6 formats *
Recommended Parameters
  - Experimental Database
  - Monte Carlo calculation of proximity function parameters Optional Optional Optional Optional None
Postprocessing
  - Negative, Union, Frame, Shrink, Erase, Overlaps out, Dividing, Dose Stratification,... ** None None
Proximity & Simulation
  - Proximity Effect Correction
** None None
  - Resist Development Simulation None None
Alignment & Adjustment (Working with Video)
  - ScanField Alignment Using Test Pattern or Stage Simulation Simulation Simulation
  - Stage Adjustment to Test Pattern or to ScanField Simulation Simulation Simulation
  - Image Acquisition Simulation Simulation Simulation
SEM inaccuracies characterization for active compensation
  - Dynamic (definition of dynamic delay) Simulation Simulation Simulation
  - Distortion (definition of SEM optical system distortion) Simulation Simulation Simulation
Exposure (Writing)
  - Using Alignment & Compensation for Dynamic and Distortion Errors Simulation Simulation Simulation
Batch Processing
  - Multiple Alignments and Exposures in batch mode Simulation Simulation Simulation
Stage Control (optional)
  - Stage Driver Simulation Simulation Simulation
Pattern Generator board None None None

*  - Export possibility is limited in not registered program.
** - Proximity Effect Correction and Postprocessing possibilities are limited

List of Features

Full

Software
  Basic modules (including Editor, Import/Export, Experimental Recommended Parameters , Postprocessing, Proximity Effect Correction, Resist Development Simulation, Exposure, Image Acquisition, Stitching and Alignment of Exposure fields, Batch Processing, SEM inaccuracies Active Compensation for Distortion and Dynamic delays, Help)
  Monte Carlo calculation of proximity function parameters is optional
  Drivers for Pattern Generator Board
  Real (custom) Stage Driver (optional)
  Pattern Generator (Image) Emulator and Stage Emulation Drivers ( Emulator driver, Manual driver )
  Drivers for Protection keylock
Hardware
  Pattern Generator board
  Protection keylock
     

Workbench

Software
  Basic modules, including Editor, Import/Export, Experimental Recommended Parameters, Postprocessing, Proximity Effect Correction, Resist Development Simulation, Help. Other functions (such as Exposure, Image Acquisition, Stitching and Alignment of Exposure fields, Batch Processing, SEM inaccuracies Active Compensation for Distortion and Dynamic delays) are included only in Simulation (Training) mode.
  Monte Carlo calculation of proximity function parameters is optional
  Pattern Generator (Image) Emulator and Stage Emulation Drivers ( Emulator driver, Manual driver )
  Drivers for Protection keylock
Hardware
  Protection keylock
     

Workbench-EDU

Reduced version of Workbench edition for educational organizations
Software
  Basic modules, including Editor, Import/Export, Experimental Recommended Parameters, Postprocessing, Proximity Effect Correction (possibility is limited to number of elements in structure and simultaneously processed elements), Resist Development Simulation, Help. Other functions (such as Exposure, Image Acquisition, Stitching and Alignment of Exposure fields, Batch Processing, SEM inaccuracies Active Compensation for Distortion and Dynamic delays) are included only in Simulation (Training) mode.
  Monte Carlo calculation of proximity function parameters is optional
  Pattern Generator (Image) Emulator and Stage Emulation Drivers ( Emulator driver, Manual driver )
  Drivers for Protection keylock
Hardware
  Protection keylock
     

Writer

Software
  Basic modules, including Editor, Import/Export, Experimental Recommended Parameters, Exposure, Image Acquisition, Stitching and Alignment of Exposure fields, Batch Processing, SEM inaccuracies Active Compensation for Distortion and Dynamic delays, Help. This edition doesn't include the Postprocessing, Proximity Effect Correction and Resist Development Simulation functions.
  Drivers for Pattern Generator Board
  Real (custom) Stage Driver (optional)
  Pattern Generator (Image) Emulator and Stage Emulation Drivers ( Emulator driver, Manual driver )
  Drivers for Protection keylock
Hardware
  Pattern Generator board
  Protection keylock
     

Editor

Fully featured graphical editor of lithographic structures
Software (Shareware)
  Basic modules, including Editor, Import/Export, Experimental Recommended Parameters, Help. Next functions are included only in Simulation (Training) Mode - Exposure, Image Acquisition, Stitching and Alignment of Exposure fields, Batch Processing, SEM inaccuracies Active Compensation for Distortion and Dynamic delays. Export possibility is limited in not registered program. This edition doesn't include the Postprocessing, Proximity Effect Correction and Resist Development Simulation functions.
  Pattern Generator (Image) Emulator and Stage Emulation Drivers ( Emulator driver, Manual driver )
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