Basic modules, including Editor, Import/Export, Experimental Recommended
Parameters, Postprocessing, Proximity Effect Correction, Resist Development
Simulation, Help. Other functions (such as Exposure, Image Acquisition,
Stitching and Alignment of Exposure fields, Batch Processing, SEM inaccuracies
Active Compensation for Distortion and Dynamic delays) are included only
in Simulation (Training) mode.
Monte Carlo calculation of proximity function parameters is optional
Reduced version of Workbench edition for educational organizations
Software
Basic modules, including Editor, Import/Export, Experimental Recommended
Parameters, Postprocessing, Proximity Effect Correction (possibility is
limited to number of elements in structure and simultaneously processed
elements), Resist Development Simulation, Help. Other functions (such
as Exposure, Image Acquisition, Stitching and Alignment of Exposure fields,
Batch Processing, SEM inaccuracies Active Compensation for Distortion
and Dynamic delays) are included only in Simulation (Training) mode.
Monte Carlo calculation of proximity function parameters is optional
Basic modules, including Editor, Import/Export, Experimental Recommended
Parameters, Exposure, Image Acquisition, Stitching and Alignment of Exposure
fields, Batch Processing, SEM inaccuracies Active Compensation for Distortion
and Dynamic delays, Help. This edition doesn't include the Postprocessing,
Proximity Effect Correction and Resist Development Simulation functions.
Fully featured graphical editor of lithographic structures
Software (Shareware)
Basic modules, including Editor, Import/Export, Experimental Recommended
Parameters, Help. Next functions are included only in Simulation (Training)
Mode - Exposure, Image Acquisition, Stitching and Alignment of Exposure
fields, Batch Processing, SEM inaccuracies Active Compensation for Distortion
and Dynamic delays. Export possibility is limited in not registered program.
This edition doesn't include the Postprocessing, Proximity Effect Correction
and Resist Development Simulation functions.