A part of Bragg-Fresnel zone plate designed for X-ray optics

A. Firsov
Application Center for Microengineering, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II, Berlin, Germany
Equipment: SEM LEO 1560, TSL laser interferometer controlled stage

Fragments of elliptical Bragg-Fresnel zone plate with 1st and 3rd order zones designed for X-ray optics.

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