A part of Bragg-Fresnel zone plate designed for X-ray optics

A. Firsov
Application Center for Microengineering, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II, Berlin, Germany
Equipment: SEM LEO 1560, TSL laser interferometer controlled stage

Fragment of elliptical Bragg-Fresnel lens based on Si. The lens with first diffraction order only (dimensions: 844 um by 160 um; last zone size – 0.3 um)

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