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A part of Bragg-Fresnel zone plate designed for X-ray optics

A. Firsov
Application Center for Microengineering, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II, Berlin, Germany
Equipment: SEM LEO 1560, TSL laser interferometer controlled stage

Fragment of elliptical Bragg-Fresnel lens based on Si. The lens with first diffraction order only (dimensions: 844 um by 160 um; last zone size – 0.3 um)

A part of Bragg-Fresnel zone plate designed for X-ray optics
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More images from Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II
(Click on image for close view)
A part of Bragg-Fresnel zone plate
1. A part of Bragg-Fresnel zone plate
A part of Bragg-Fresnel zone plate designed...
2. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate designed...
3. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate designed...
4. A part of Bragg-Fresnel zone plate designed...
Strips of width near 40 nm created in PMMA resist
5. Strips of width near 40 nm created in PMMA resist
A part of Bragg-Fresnel zone plate designed...
6. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate designed...
7. A part of Bragg-Fresnel zone plate designed...
Reflection Zone Plates for focusing X-rays
8. Reflection Zone Plates for focusing X-rays
Fragment of the last zones at the monochromator...
9. Fragment of the last zones at the monochromator...
A part of Bragg-Fresnel zone plate designed...
10. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate designed...
11. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate designed...
12. A part of Bragg-Fresnel zone plate designed...
Strips of 40 nm width in resist
13. Strips of 40 nm width in resist
System of lenses at the second monochromator...
14. System of lenses at the second monochromator...
                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                   
 
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