Reflection Zone Plates for focusing X-rays

A. Firsov
Application Center for Microengineering, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II, Berlin, Germany
Equipment: SEM LEO 1560, TSL laser interferometer controlled stage

Gold reflection off-axis zone plates on a Si substrate. The lenses designed for three energies: 715 eV, 785 eV, 861 eV. Focal distance: 902 cm. Outer zone: 1.1 µm. Aperture: 80 mm x 10 mm Lenses groove depth is 14 nm. Combination on the same optical element the reflection, focusing and dispersion.

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