Reflection Zone Plates for focusing X-rays
A. Firsov
Application Center for Microengineering,
Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II, Berlin, Germany
Equipment: SEM LEO 1560, TSL laser interferometer controlled stage
Gold reflection off-axis zone plates on a Si substrate. The lenses designed for three energies: 715 eV, 785 eV, 861 eV.
Focal distance: 902 cm. Outer zone: 1.1 µm. Aperture: 80 mm x 10 mm
Lenses groove depth is 14 nm.
Combination on the same optical element the reflection, focusing and dispersion.
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