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Reflection Zone Plates for focusing X-rays

A. Firsov
Application Center for Microengineering, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II, Berlin, Germany
Equipment: SEM LEO 1560, TSL laser interferometer controlled stage

Gold reflection off-axis zone plates on a Si substrate. The lenses designed for three energies: 715 eV, 785 eV, 861 eV. Focal distance: 902 cm. Outer zone: 1.1 µm. Aperture: 80 mm x 10 mm Lenses groove depth is 14 nm. Combination on the same optical element the reflection, focusing and dispersion.

Reflection Zone Plates for focusing X-rays
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More images from Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II
(Click on image for close view)
Reflection Zone Plates for focusing X-rays
1. Reflection Zone Plates for focusing X-rays
A part of Bragg-Fresnel zone plate designed...
2. A part of Bragg-Fresnel zone plate designed...
Strips of 40 nm width in resist
3. Strips of 40 nm width in resist
System of lenses at the second monochromator...
4. System of lenses at the second monochromator...
Fragment of the last zones at the monochromator...
5. Fragment of the last zones at the monochromator...
A part of Bragg-Fresnel zone plate
6. A part of Bragg-Fresnel zone plate
A part of Bragg-Fresnel zone plate designed...
7. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate designed...
8. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate designed...
9. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate designed...
10. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate designed...
11. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate designed...
12. A part of Bragg-Fresnel zone plate designed...
Strips of width near 40 nm created in PMMA resist
13. Strips of width near 40 nm created in PMMA resist
A part of Bragg-Fresnel zone plate designed...
14. A part of Bragg-Fresnel zone plate designed...
                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                   
 
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