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Reflection Zone Plates for focusing X-rays

A. Firsov
Application Center for Microengineering, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II, Berlin, Germany
Equipment: SEM LEO 1560, TSL laser interferometer controlled stage

Gold reflection off-axis zone plates on a Si substrate. The lenses designed for three energies: 715 eV, 785 eV, 861 eV. Focal distance: 902 cm. Outer zone: 1.1 m. Aperture: 80 mm x 10 mm Lenses groove depth is 14 nm. Combination on the same optical element the reflection, focusing and dispersion.

Reflection Zone Plates for focusing X-rays
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More images from Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II
(Click on image for close view)
A part of Bragg-Fresnel zone plate designed...
1. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate designed...
2. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate designed...
3. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate designed...
4. A part of Bragg-Fresnel zone plate designed...
Strips of width near 40 nm created in PMMA resist
5. Strips of width near 40 nm created in PMMA resist
A part of Bragg-Fresnel zone plate designed...
6. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate designed...
7. A part of Bragg-Fresnel zone plate designed...
System of lenses at the second monochromator...
8. System of lenses at the second monochromator...
A part of Bragg-Fresnel zone plate designed...
9. A part of Bragg-Fresnel zone plate designed...
Strips of 40 nm width in resist
10. Strips of 40 nm width in resist
Reflection Zone Plates for focusing X-rays
11. Reflection Zone Plates for focusing X-rays
A part of Bragg-Fresnel zone plate
12. A part of Bragg-Fresnel zone plate
Fragment of the last zones at the monochromator...
13. Fragment of the last zones at the monochromator...
A part of Bragg-Fresnel zone plate designed...
14. A part of Bragg-Fresnel zone plate designed...
                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                   
 
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