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Photonic crystal for visible wavelengths made of perforated Si3N4. Free standing membrane.

J. Kouba
Application Center for Microengineering, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II, Berlin, Germany
Equipment: SEM LEO 1560, TSL laser interferometer controlled stage

Photonic crystal for visible wavelengths made of perforated Si3N4. Free standing membrane.

Photonic crystal for visible wavelengths made of perforated Si<sub>3</sub>N<sub>4</sub>. Free standing membrane.
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More images from Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II
(Click on image for close view)
Real fabricated Si<sub>3</sub>N<sub>4</sub>...
1. Real fabricated Si3N4...
Two dimensional photonic crystal
2. Two dimensional photonic crystal
Photonic crystals with introduced lattice defects
3. Photonic crystals with introduced lattice defects
Two dimensional photonic crystal
4. Two dimensional photonic crystal
Two dimensional photonic crystal
5. Two dimensional photonic crystal
Square lattice type two dimensional photonic...
6. Square lattice type two dimensional photonic...
Overview of hexagonal lattice type photonic...
7. Overview of hexagonal lattice type photonic...
Photonic crystal for visible wavelengths...
8. Photonic crystal for visible wavelengths...
Real fabricated Si<sub>3</sub>N<sub>4</sub>...
9. Real fabricated Si3N4...
Overview of hexagonal lattice type photonic...
10. Overview of hexagonal lattice type photonic...
Fragment of hexagonal lattice type photonic...
11. Fragment of hexagonal lattice type photonic...
Hexagonal lattice type photonic crystal in...
12. Hexagonal lattice type photonic crystal in...
Hexagonal lattice type photonic crystal in...
13. Hexagonal lattice type photonic crystal in...
Two dimensional photonic crystal
14. Two dimensional photonic crystal
Hexagonal lattice of holes.
15. Hexagonal lattice of holes.
Photonic crystal for visible wavelengths...
16. Photonic crystal for visible wavelengths...
Two dimensional photonic crystal
17. Two dimensional photonic crystal
Fragment of hexagonal lattice type photonic...
18. Fragment of hexagonal lattice type photonic...
Bars of width near 100 nm
19. Bars of width near 100 nm
                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                   
 
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