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Real fabricated Si3N4 photonic crystal sample

J. Kouba
Application Center for Microengineering, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II, Berlin, Germany
Equipment: SEM LEO 1560, TSL laser interferometer controlled stage

Free standing Si3N4 photonic crystal membrane with hexagonal lattice of air holes with lattice period 270 nm and membrane thickness 200 nm as used for measurement of the photonic crystal bulk transmission

Real fabricated Si<sub>3</sub>N<sub>4</sub> photonic crystal sample
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More images from Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II
(Click on image for close view)
Photonic crystals with introduced lattice defects
1. Photonic crystals with introduced lattice defects
Fragment of hexagonal lattice type photonic...
2. Fragment of hexagonal lattice type photonic...
Two dimensional photonic crystal
3. Two dimensional photonic crystal
Two dimensional photonic crystal
4. Two dimensional photonic crystal
Hexagonal lattice type photonic crystal in...
5. Hexagonal lattice type photonic crystal in...
Hexagonal lattice type photonic crystal in...
6. Hexagonal lattice type photonic crystal in...
Fragment of hexagonal lattice type photonic...
7. Fragment of hexagonal lattice type photonic...
Bars of width near 100 nm
8. Bars of width near 100 nm
Overview of hexagonal lattice type photonic...
9. Overview of hexagonal lattice type photonic...
Two dimensional photonic crystal
10. Two dimensional photonic crystal
Overview of hexagonal lattice type photonic...
11. Overview of hexagonal lattice type photonic...
Photonic crystal for visible wavelengths...
12. Photonic crystal for visible wavelengths...
Real fabricated Si<sub>3</sub>N<sub>4</sub>...
13. Real fabricated Si3N4...
Hexagonal lattice of holes.
14. Hexagonal lattice of holes.
Square lattice type two dimensional photonic...
15. Square lattice type two dimensional photonic...
Real fabricated Si<sub>3</sub>N<sub>4</sub>...
16. Real fabricated Si3N4...
Photonic crystal for visible wavelengths...
17. Photonic crystal for visible wavelengths...
Two dimensional photonic crystal
18. Two dimensional photonic crystal
Two dimensional photonic crystal
19. Two dimensional photonic crystal
                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                   
 
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