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Fragment of hexagonal lattice type photonic crystal in S3N4

J. Kouba
Application Center for Microengineering, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II, Berlin, Germany
Equipment: SEM LEO 1560, TSL laser interferometer controlled stage

Silicon nitride based two dimensional photonic crystals for visible spectral range

Fragment of hexagonal lattice type photonic crystal in S<sub>3</sub>N<sub>4</sub>
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More images from Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II
(Click on image for close view)
Overview of hexagonal lattice type photonic...
1. Overview of hexagonal lattice type photonic...
Two dimensional photonic crystal
2. Two dimensional photonic crystal
Overview of hexagonal lattice type photonic...
3. Overview of hexagonal lattice type photonic...
Photonic crystals with introduced lattice defects
4. Photonic crystals with introduced lattice defects
Square lattice type two dimensional photonic...
5. Square lattice type two dimensional photonic...
Real fabricated Si<sub>3</sub>N<sub>4</sub>...
6. Real fabricated Si3N4...
Hexagonal lattice type photonic crystal in...
7. Hexagonal lattice type photonic crystal in...
Fragment of hexagonal lattice type photonic...
8. Fragment of hexagonal lattice type photonic...
Two dimensional photonic crystal
9. Two dimensional photonic crystal
Hexagonal lattice type photonic crystal in...
10. Hexagonal lattice type photonic crystal in...
Real fabricated Si<sub>3</sub>N<sub>4</sub>...
11. Real fabricated Si3N4...
Two dimensional photonic crystal
12. Two dimensional photonic crystal
Fragment of hexagonal lattice type photonic...
13. Fragment of hexagonal lattice type photonic...
Bars of width near 100 nm
14. Bars of width near 100 nm
Two dimensional photonic crystal
15. Two dimensional photonic crystal
Two dimensional photonic crystal
16. Two dimensional photonic crystal
Hexagonal lattice of holes.
17. Hexagonal lattice of holes.
Photonic crystal for visible wavelengths...
18. Photonic crystal for visible wavelengths...
Photonic crystal for visible wavelengths...
19. Photonic crystal for visible wavelengths...
                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                   
 
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