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Square lattice type two dimensional photonic crystal in S3N4

J. Kouba
Application Center for Microengineering, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II, Berlin, Germany
Equipment: SEM LEO 1560, TSL laser interferometer controlled stage

Silicon nitride based two dimensional photonic crystals for visible spectral range

Square lattice type two dimensional photonic crystal in S<sub>3</sub>N<sub>4</sub>
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More images from Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II
(Click on image for close view)
Hexagonal lattice type photonic crystal in...
1. Hexagonal lattice type photonic crystal in...
Hexagonal lattice of holes.
2. Hexagonal lattice of holes.
Fragment of hexagonal lattice type photonic...
3. Fragment of hexagonal lattice type photonic...
Two dimensional photonic crystal
4. Two dimensional photonic crystal
Two dimensional photonic crystal
5. Two dimensional photonic crystal
Fragment of hexagonal lattice type photonic...
6. Fragment of hexagonal lattice type photonic...
Overview of hexagonal lattice type photonic...
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Two dimensional photonic crystal
8. Two dimensional photonic crystal
Real fabricated Si<sub>3</sub>N<sub>4</sub>...
9. Real fabricated Si3N4...
Photonic crystal for visible wavelengths...
10. Photonic crystal for visible wavelengths...
Square lattice type two dimensional photonic...
11. Square lattice type two dimensional photonic...
Overview of hexagonal lattice type photonic...
12. Overview of hexagonal lattice type photonic...
Hexagonal lattice type photonic crystal in...
13. Hexagonal lattice type photonic crystal in...
Bars of width near 100 nm
14. Bars of width near 100 nm
Photonic crystal for visible wavelengths...
15. Photonic crystal for visible wavelengths...
Two dimensional photonic crystal
16. Two dimensional photonic crystal
Real fabricated Si<sub>3</sub>N<sub>4</sub>...
17. Real fabricated Si3N4...
Two dimensional photonic crystal
18. Two dimensional photonic crystal
Photonic crystals with introduced lattice defects
19. Photonic crystals with introduced lattice defects
                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                   
 
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