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Overview of hexagonal lattice type photonic crystal in S3N4

J. Kouba
Application Center for Microengineering, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II, Berlin, Germany
Equipment: SEM LEO 1560, TSL laser interferometer controlled stage

Silicon nitride based two dimensional photonic crystals for visible spectral range

Overview of hexagonal lattice type photonic crystal in S<sub>3</sub>N<sub>4</sub>
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More images from Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II
(Click on image for close view)
Two dimensional photonic crystal
1. Two dimensional photonic crystal
Photonic crystal for visible wavelengths...
2. Photonic crystal for visible wavelengths...
Two dimensional photonic crystal
3. Two dimensional photonic crystal
Real fabricated Si<sub>3</sub>N<sub>4</sub>...
4. Real fabricated Si3N4...
Fragment of hexagonal lattice type photonic...
5. Fragment of hexagonal lattice type photonic...
Hexagonal lattice of holes.
6. Hexagonal lattice of holes.
Two dimensional photonic crystal
7. Two dimensional photonic crystal
Overview of hexagonal lattice type photonic...
8. Overview of hexagonal lattice type photonic...
Fragment of hexagonal lattice type photonic...
9. Fragment of hexagonal lattice type photonic...
Bars of width near 100 nm
10. Bars of width near 100 nm
Photonic crystal for visible wavelengths...
11. Photonic crystal for visible wavelengths...
Real fabricated Si<sub>3</sub>N<sub>4</sub>...
12. Real fabricated Si3N4...
Hexagonal lattice type photonic crystal in...
13. Hexagonal lattice type photonic crystal in...
Two dimensional photonic crystal
14. Two dimensional photonic crystal
Two dimensional photonic crystal
15. Two dimensional photonic crystal
Overview of hexagonal lattice type photonic...
16. Overview of hexagonal lattice type photonic...
Square lattice type two dimensional photonic...
17. Square lattice type two dimensional photonic...
Photonic crystals with introduced lattice defects
18. Photonic crystals with introduced lattice defects
Hexagonal lattice type photonic crystal in...
19. Hexagonal lattice type photonic crystal in...
                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                   
 
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