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Real fabricated Si3N4 photonic crystal sample

J. Kouba
Application Center for Microengineering, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II, Berlin, Germany
Equipment: SEM LEO 1560, TSL laser interferometer controlled stage

Free standing Si3N4 photonic crystal membrane with hexagonal lattice of air holes.

Real fabricated Si<sub>3</sub>N<sub>4</sub> photonic crystal sample
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More images from Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II
(Click on image for close view)
Overview of hexagonal lattice type photonic...
1. Overview of hexagonal lattice type photonic...
Two dimensional photonic crystal
2. Two dimensional photonic crystal
Hexagonal lattice of holes.
3. Hexagonal lattice of holes.
Hexagonal lattice type photonic crystal in...
4. Hexagonal lattice type photonic crystal in...
Two dimensional photonic crystal
5. Two dimensional photonic crystal
Two dimensional photonic crystal
6. Two dimensional photonic crystal
Two dimensional photonic crystal
7. Two dimensional photonic crystal
Hexagonal lattice type photonic crystal in...
8. Hexagonal lattice type photonic crystal in...
Overview of hexagonal lattice type photonic...
9. Overview of hexagonal lattice type photonic...
Two dimensional photonic crystal
10. Two dimensional photonic crystal
Photonic crystal for visible wavelengths...
11. Photonic crystal for visible wavelengths...
Square lattice type two dimensional photonic...
12. Square lattice type two dimensional photonic...
Real fabricated Si<sub>3</sub>N<sub>4</sub>...
13. Real fabricated Si3N4...
Fragment of hexagonal lattice type photonic...
14. Fragment of hexagonal lattice type photonic...
Real fabricated Si<sub>3</sub>N<sub>4</sub>...
15. Real fabricated Si3N4...
Photonic crystal for visible wavelengths...
16. Photonic crystal for visible wavelengths...
Photonic crystals with introduced lattice defects
17. Photonic crystals with introduced lattice defects
Bars of width near 100 nm
18. Bars of width near 100 nm
Fragment of hexagonal lattice type photonic...
19. Fragment of hexagonal lattice type photonic...
                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                   
 
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