NanoMaker was integrated with laser interferometer
controlled stage mounted on scanning electron microscope LEO 1560 at BESSY
The interferometer controlled X-Y laser stage from Technology
Sources has 150mm travel limits with positioning resolution of 2.5
Using the NanoMaker unique features of exposure fields stitching based
on dynamic compensation and high resolution interferometer stage, new
setup gives a demonstration of excellent results in production of large-scale
devices (up to a few centimeters). On the photos below there are two examples
of such devices for X-ray optics and spectroscopy. Figures 2a. and 2b.
demonstrate Ge single crystal monochromator with a gold reflection zone
plates. Figure 3. presents fragments of elliptical Bragg-Fresnel zone
All photos have been courteously given by
, BESSY II, Berlin.