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Gas Assisted Focused Electron Beam Induced Deposition

Gas Assisted Focused Electron Beam Induced Deposition of Thin Films

Another application where NanoMaker can be successfully used is a controlled deposition of thin film coatings on substrates by decomposing of metal-organic vapors induced by focused electron beam irradiation (so called Gas Assisted EBL). Available NanoMaker functionality allows to form coatings of a given shape and thickness with high spatial resolution in a specified location on a substrate.
A series of experiments was carried out at the University of Pennsylvania, USA, in order to assess the ability of the NanoMaker to provide a direct deposition of gold and platinum films. Deposition was accomplished on a FEI Quanta 600 FEG microscope equipped with several inlet nozzles for supplying various metal-organic compounds from single-source precursors, and including precursors containing gold and platinum. We are grateful to Dr. L. Rotkina for the given photos.
Platinum direct deposited film and fine pattern Fragment of fine pattern with 30, 20 and 10 nm lines
Fig. 1. Platinum direct deposited film and fine pattern

Fig. 1. and Fig. 1a. show the results of deposition of thin platinum film on a silicon substrate in a form of trapezoidal pads of different thickness, as well as fine superscribe and three thin lines of width 30, 20 and 10 nm below it. Picture was taken a few minutes after deposition and closing of the nozzle.
      Fig. 1a. Fragment of fine pattern with 30, 20 and 10 nm lines
Set of deposited gold wedges
Fig. 2 presents the results of gold film deposition in form of a wedge of variable thickness in order to determine parameters of the deposition process. A dose wedge, which is commonly used in electron-beam lithography for experimental determination of a resist sensitivity, was selected as NanoMaker working structure. The structure represents a long rectangle, consisting of a set of narrow adjacent rectangles (total of 101 pieces) of equal area but differing in exposure time).

Set of deposited gold wedges Thin film wedge
Fig. 2. Set of deposited gold wedges
Fragment of thin film wedge Thin film wedge
Fig. 2a. The wedge with exfoliated film
Exposure time of rectangles increases linearly from left to right so that the time of the rightmost rectangle exceeds 10 times the exposure time of the leftmost rectangle. Series of experiments were performed for different deposition conditions. The photo clearly shows that the thickness of the deposited wedges increases from top to bottom one, which affects the brightness changes in the formed image. And at the very bottom wedge even exfoliation the film occurred due to stresses encountered. Since the microscope is not equipped with beam blanker, pillars of the deposited metal are visible left below each of the structures. These pillars grow at a time when beam settle in a park position during the exposure. Light haloes around pillars are result of exposure by backscattered electrons so proximity parameters can be acquired from the experiments.
Fig. 2b. Fragment of the wedge with exfoliated film
Date Added: Dec 14, 2010  
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