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Q&A item.

Q&A item

Q&A: General

Q: What the accuracy of fields stitching can be achieved when moving the stage in the following cases: using additional markers in each field and without them?
A: The accuracy of field stitching depends on accuracy of stage movement mostly.
With the help of NanoMaker the sources of inaccuracies like:
  • disalignment of stage coordinate system and scanning system
  • distortion of microscope optics (non-liner errors)
  • the whole system drift could be measured and accordingly corrected.

    When a motorized stage without laser interferometer is used the accuracy of stitching depends on markers quality. See "Large Area Exposure with Automatic Stitching by Alignment using conventional Mechanical Stage and Grid of Markers" topic in Examples of Use section) where accuracy of stitching is better than 100 nm has been reached in 200 um exposure field.

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