Essential instruments/facilities/conditions for NanoMaker installation
List of essential Instruments/Facilities/Conditions
for NanoMaker installation
Next instruments/facilities/conditions we will need to fulfill the installation
The SEM must be fully operable during installation procedure and provide
high resolution images, close to declared by vendor parameters. External Scan
interface must be operable.
Separate PC compatible Pentium or higher-class computer under MS Windows
2000/XP/7 OS (English/American language version) with Administrator privileges
access. Free access is required under computer case to install NanoMaker Pattern
Generator hardware into free PCIe slot. Free USB or LPT port to install protection
The SEM has to be equipped with special specimen holder that carries Faraday
Cap, high resolution test specimen and allows to hold pieces of silicon substrate
with clips (without gluing). An example of such holder you can see at the
site of SEMTech Solutions company:
here and here.
A Picoammeter must be connected to specimen holder to measure absorbed
beam current in range 1 pA - 1 uA (Keithley 485 picoammeter or similar is
Facilities and chemicals for resist development after exposure. Usually,
during the installation we use Si substrates (pieces of wafer) of 1x1 cm size
approximately covered by PMMA 950K resist. The development solution is IsoPropilAlcohol
in water = 8:1. If customer wants to try different substrates/resists - this
is up to his responsibility.
An optical microscope with good enough resolution (submicron) to inspect
the result of resist development.
To fulfill lithographic tasks SEM need to be calibrated. For that end customer
need to have special calibration specimen. For example, like calibration pattern
S1930 from Agar Scientific Ltd. ( http://www.agarscientific.com/) or similar.
This specimen will be useful for long time of exploiting.
A simple oscilloscope can be useful during the installation.