"Deep" X-ray diffraction gratings based on Si (400) crystal

М. Knyazev, V. Starkov, D. Roshchupkin
IMT RAS , Chernogolovka, Russia
Equipment: SEM Zeiss EVO 50

Diffraction grating is a profiled surface of Si wafer in the form of a square consisting of a set of parallel Si strips, separated by an air space. Overall size of the square is 400 x 400 um². The depth of the grating is 2.5 um at period 1 um. Accordingly, the aspect ratio of the diffraction grating is ~ 5. To create grating, first, a topological profile in resist was made using electron beam lithography. Then thin metal film of Cr was deposited on the surface. This film with the help of explosive lithography "lift-off" formed metal mask for subsequent etching. At final step, formation of the grid structure in the Si was carried out by reactive ion etching (ECR plasma).

Front view of the Si diffraction grating with period of 1 um.

More images from other authors

A. Firsov; Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II Strips of width near 40 nm created in PMMA resist...

G.Goltsman, K. Smirnov, N.Kaurova et al.; MSPU Superconducting Hot-Electron Bolometer Mixer for Terahertz Heterodyne Receivers...

J. Kouba; Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II Photonic crystals with introduced lattice defects...

V. Gurtovoi, A. Firsov; IMT RAS Quantum state detector...

A. Nashchekin, E. Arakcheeva, E. Tanklevskaya; Ioffe Physico-Technical Institute RAS 2D PhC with the InAs/InGaAs quantum-dot structure as an active region...

Y. Kasumov et al.; IMT RAS1 and ISSP RAS2 Selective growth of single-walled carbon nanotubes and fabrication of devices on their base...

Yu. Petrov, Prof. O. Vyvenko; St. Petersburg State University Happy New 2011 year with ion beam lithography!...

A. Vystavkin, A. Kuzmin, S. Shitov, A. Kovalenko, I. Kon, A. Uvarov, et al.; Institute of Radioengineering and Electronics (IRE) of RAS Array of superconducting terahertz hot-electron bolometers...

E. Konstantinov, E. Demidov; Herzen State Pedagogical University Submicron bismuth (Bi) wires...

V. Gurtovoi2, V. Antonov1; Royal Holloway University1 Multiple superconducting ring ratchet...