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Happy New 2011 year with ion beam lithography!

Yu. Petrov, Prof. O. Vyvenko
Nanotechnology Center, St. Petersburg State University, St. Petersburg, Russia
Equipment: Zeiss Orion helium-ion microscope

Happy New 2011 year with ion beam lithography! The structure was written in 150 nm PMMA at 17 kV acceleration voltage and 0.5 pA ion beam current.

Happy New 2011 year with ion beam lithography!
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More images from other authors

Strips of width near 40 nm created in PMMA resist A. Firsov; Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II
Strips of width near 40 nm created in PMMA resist... More...
Superconducting Hot-Electron Bolometer Mixer for Terahertz Heterodyne G.Goltsman, K. Smirnov, N.Kaurova et al.; MSPU
Superconducting Hot-Electron Bolometer Mixer for Terahertz Heterodyne Receivers... More...
Hexagonal lattice type photonic crystal in S<sub>3</sub>N<sub>4</sub> J. Kouba; Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II
Hexagonal lattice type photonic crystal in S3N4... More...
Quantum state detector V. Gurtovoi, A. Firsov; IMT RAS
Quantum state detector... More...
Two-dimensional semiconductor photonic crystal with a hexagonal lattic A. Nashchekin, E. Arakcheeva, E. Tanklevskaya; Ioffe Physico-Technical Institute RAS
Two-dimensional semiconductor photonic crystal with a hexagonal lattice of submicrometer holes ... More...
Selective growth of single-walled carbon nanotubes and fabrication of Y. Kasumov et al.; IMT RAS1 and ISSP RAS2
Selective growth of single-walled carbon nanotubes and fabrication of devices on their base... More...
Single receiving element of superconducting terahertz hot-electron bol A. Vystavkin, A. Kuzmin, S. Shitov, A. Kovalenko, I. Kon, A. Uvarov, et al.; Institute of Radioengineering and Electronics (IRE) of RAS
Single receiving element of superconducting terahertz hot-electron bolometer incorporated into a planar antenna... More...
"Deep" X-ray diffraction gratings based on Si (400) crystal М. Knyazev, V. Starkov, D. Roshchupkin; IMT RAS
"Deep" X-ray diffraction gratings based on Si (400) crystal... More...
Submicron bismuth (Bi) wires E. Konstantinov, E. Demidov; Herzen State Pedagogical University
Submicron bismuth (Bi) wires... More...
Multiple superconducting ring ratchet V. Gurtovoi2, V. Antonov1; Royal Holloway University1
Multiple superconducting ring ratchet... More...
More images from St. Petersburg State University
(Click on image for close view)
Happy New 2011 year with ion beam lithography!
1. Happy New 2011 year with ion beam lithography!
Patterning with ion focused beam on a gold...
2. Patterning with ion focused beam on a gold...
Site name written on a single thread-like...
3. Site name written on a single thread-like...
An array of 10 nm holes in pyrographite
4. An array of 10 nm holes in pyrographite
An array of circles on the surface of platinum
5. An array of circles on the surface of platinum
                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                   
 
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