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Patterning with ion focused beam on a gold film on carbon.

Yu. Petrov, Prof. O. Vyvenko
Nanotechnology Center, St. Petersburg State University, St. Petersburg, Russia
Equipment: Zeiss Orion helium-ion microscope

Patterning with ion focused beam on a gold film on carbon. Resolution better than 10 nm was achieved. The etching was performed with the current of 1 pA in little less than 3 minutes. Distortion of the last letter and of the emphasizing line observed on the right side is due to curvature of the gold particle surface.

Patterning with ion focused beam on a gold film on carbon.
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