Quantum state detector

V. Gurtovoi, A. Firsov
IMT RAS , Chernogolovka, Russia
Equipment: SEM Zeiss EVO 50

Quantum state detector. E-beam restist: PMMA 950K 4% (0.3 um thickness). Acceleration voltage 25 kV. Metal structure was created by lift-off (metallisation thickness: 35 nm of Al)

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