Q&A: Recommended Parameters, Monte Carlo Calculation
Q:
I would assume that the Monte Carlo Simulation would not work unless we purchase the Workbench software? I would assume that the Monte Carlo Simulation would not work unless we purchase the Workbench software?
A:
Monte Carlo simulator seamlessly integrated in NanoMaker software. It will work in NanoMaker-Writer, allowing calculating exposure parameters for multilayer structures and for resists and/or substrates not listed in Recommended Parameters table. But, of course, the full effect of this simulation can be felt only in conjunction with the calculation of proximity effect correction.
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