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Q&A item.

Q&A item

Q&A: General

Q: What are the advantages of NanoMaker?
A: There are some essential know-how and advantages which make our product more preferable. Among of them:
  • excellent and widely published theoretical method applied for development (see White Papers)
  • real 3D (!) proximity correction and resist development simulation
  • longtime (more than 18 years) exploitation of the algorithm/software what means long-term testing by tens of users (the development simulation subsystem is the same as in PROXY software)
  • seamless integration of design and production stages of lithography process
  • possibility to work without beam blanker
  • measurement and correction on-fly of dynamic and static errors of deflection system that significantly reduces total exposure time
  • modern Pattern Generator hardware solution based on two separate devices for significant interference/noise reduction: computer interface PCIe card and standalone unit communicating with a microscope, which are connected with fiber-optic link only
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