The proximity effect correction (PEC)
Typically, to all elements, at design stage, are assigned the same dose value. Because of the proximity effect this does not lead to good process results. PEC software allows to recalculate dose for each element and even to cut elements for parts with slightly different dose to achieve better exposure results. The PEC software uses for calculation a few proximity function parameters, which depends on e-beam conditions (energy, size) and resist and substrate. The NanoMaker includes the experimental Recommended Parameters database, which allows to choose right proximity function parameters just specifying the set of process parameters.
First continuous dose distribution is calculated and then the design is divided into parts (zones) with constant doses according to the number of preset dose levels.
The dose distribution can be easily presented using color coding.
