Image Array Acquisition for large-scale micro objects diagnostics
July 21, 2005
Image Array Acquisition (IAA) procedure
was developed. The procedure acquires an array of images arranged in grid
with stage displacements and writing the images to separate files. This
procedure can be used for creation of high-resolution panoramic view of
large-scale micro objects.
Fig. Fragment of image array captured (the image was resampled for publication).
Yellow lines show the bounds of individual images.
All parameters of individual image (size in pixels and distance per pixel)
and of array arrangement (number of rows and columns, step between image centers,
start point) are predefined. Preparatory standard alignment and calibration
operation are applied. IAA procedure is executed in automatic mode. If total
area of images to be captured exceeds the SEM scan field, stage displacements
are involved into IAA procedure. Every acquired image is saved to hard disk
as TIFF file into a subfolder arranged for each array row. Periodical automatic
drift correction can be applied after predefined time interval or number of
Photo shows the 3x3 image array aggregated in one image (for stitching demonstration),
which is a fragment of large size array. Every image has 1024x1024 pixel size
and covers area of 5x5 um. Stage moving was carried out between consecutive image acquisitions.