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Bars of width near 100 nm

J. Kouba
Application Center for Microengineering, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II, Berlin, Germany
Equipment: SEM LEO 1560, TSL laser interferometer controlled stage

Bars of width near 100 nm.

Bars of width near 100 nm
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Bars of width near 100 nm
18. Bars of width near 100 nm
Two dimensional photonic crystal
19. Two dimensional photonic crystal
                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                   
 
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