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A part of Bragg-Fresnel zone plate designed for X-ray optics

A. Firsov
Application Center for Microengineering, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II, Berlin, Germany
Equipment: SEM LEO 1560, TSL laser interferometer controlled stage

Fragments of elliptical Bragg-Fresnel zone plate with 1st and 3rd order zones designed for X-ray optics.

A part of Bragg-Fresnel zone plate designed for X-ray optics
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More images from Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II
(Click on image for close view)
A part of Bragg-Fresnel zone plate designed...
1. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate designed...
2. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate designed...
3. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate designed...
4. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate designed...
5. A part of Bragg-Fresnel zone plate designed...
System of lenses at the second monochromator...
6. System of lenses at the second monochromator...
Reflection Zone Plates for focusing X-rays
7. Reflection Zone Plates for focusing X-rays
A part of Bragg-Fresnel zone plate
8. A part of Bragg-Fresnel zone plate
Fragment of the last zones at the monochromator...
9. Fragment of the last zones at the monochromator...
A part of Bragg-Fresnel zone plate designed...
10. A part of Bragg-Fresnel zone plate designed...
Strips of 40 nm width in resist
11. Strips of 40 nm width in resist
A part of Bragg-Fresnel zone plate designed...
12. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate designed...
13. A part of Bragg-Fresnel zone plate designed...
Strips of width near 40 nm created in PMMA resist
14. Strips of width near 40 nm created in PMMA resist
                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                   
 
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