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Real fabricated Si3N4 photonic crystal sample

J. Kouba
Application Center for Microengineering, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II, Berlin, Germany
Equipment: SEM LEO 1560, TSL laser interferometer controlled stage

Free standing Si3N4 photonic crystal membrane with hexagonal lattice of air holes.

Real fabricated Si<sub>3</sub>N<sub>4</sub> photonic crystal sample
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More images from Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II
(Click on image for close view)
Two dimensional photonic crystal
1. Two dimensional photonic crystal
Photonic crystal for visible wavelengths...
2. Photonic crystal for visible wavelengths...
Two dimensional photonic crystal
3. Two dimensional photonic crystal
Hexagonal lattice type photonic crystal in...
4. Hexagonal lattice type photonic crystal in...
Hexagonal lattice of holes.
5. Hexagonal lattice of holes.
Two dimensional photonic crystal
6. Two dimensional photonic crystal
Fragment of hexagonal lattice type photonic...
7. Fragment of hexagonal lattice type photonic...
Photonic crystal for visible wavelengths...
8. Photonic crystal for visible wavelengths...
Fragment of hexagonal lattice type photonic...
9. Fragment of hexagonal lattice type photonic...
Overview of hexagonal lattice type photonic...
10. Overview of hexagonal lattice type photonic...
Bars of width near 100 nm
11. Bars of width near 100 nm
Photonic crystals with introduced lattice defects
12. Photonic crystals with introduced lattice defects
Real fabricated Si<sub>3</sub>N<sub>4</sub>...
13. Real fabricated Si3N4...
Square lattice type two dimensional photonic...
14. Square lattice type two dimensional photonic...
Real fabricated Si<sub>3</sub>N<sub>4</sub>...
15. Real fabricated Si3N4...
Two dimensional photonic crystal
16. Two dimensional photonic crystal
Hexagonal lattice type photonic crystal in...
17. Hexagonal lattice type photonic crystal in...
Overview of hexagonal lattice type photonic...
18. Overview of hexagonal lattice type photonic...
Two dimensional photonic crystal
19. Two dimensional photonic crystal
                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                   
 
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