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Fragment of hexagonal lattice type photonic crystal at intermediate technology step

J. Kouba
Application Center for Microengineering, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II, Berlin, Germany
Equipment: SEM LEO 1560, TSL laser interferometer controlled stage

Nickel metal islands after successful lift off process. Intermediate step for fabrication of the pillars in silicon nitride to produce hexagonal lattice type photonic crystal.

Fragment of hexagonal lattice type photonic crystal at intermediate technology step
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More images from Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II
(Click on image for close view)
Overview of hexagonal lattice type photonic...
1. Overview of hexagonal lattice type photonic...
Real fabricated Si<sub>3</sub>N<sub>4</sub>...
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Two dimensional photonic crystal
3. Two dimensional photonic crystal
Photonic crystal for visible wavelengths...
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Fragment of hexagonal lattice type photonic...
5. Fragment of hexagonal lattice type photonic...
Hexagonal lattice of holes.
6. Hexagonal lattice of holes.
Two dimensional photonic crystal
7. Two dimensional photonic crystal
Two dimensional photonic crystal
8. Two dimensional photonic crystal
Photonic crystals with introduced lattice defects
9. Photonic crystals with introduced lattice defects
Two dimensional photonic crystal
10. Two dimensional photonic crystal
Hexagonal lattice type photonic crystal in...
11. Hexagonal lattice type photonic crystal in...
Hexagonal lattice type photonic crystal in...
12. Hexagonal lattice type photonic crystal in...
Real fabricated Si<sub>3</sub>N<sub>4</sub>...
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Overview of hexagonal lattice type photonic...
15. Overview of hexagonal lattice type photonic...
Bars of width near 100 nm
16. Bars of width near 100 nm
Fragment of hexagonal lattice type photonic...
17. Fragment of hexagonal lattice type photonic...
Square lattice type two dimensional photonic...
18. Square lattice type two dimensional photonic...
Two dimensional photonic crystal
19. Two dimensional photonic crystal
                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                   
 
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