Hexagonal lattice of holes.
J. Kouba
Application Center for Microengineering,
Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II, Berlin, Germany
Equipment: SEM LEO 1560, TSL laser interferometer controlled stage
Silicon nitride based two dimensional photonic crystals for visible spectral range. Hexagonal lattice of holes in S3N4
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