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Hexagonal lattice type photonic crystal in S3N4

J. Kouba
Application Center for Microengineering, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II, Berlin, Germany
Equipment: SEM LEO 1560, TSL laser interferometer controlled stage

Silicon nitride based two dimensional photonic crystals for visible spectral range

Hexagonal lattice type photonic crystal in S<sub>3</sub>N<sub>4</sub>
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More images from Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II
(Click on image for close view)
Photonic crystal for visible wavelengths...
1. Photonic crystal for visible wavelengths...
Two dimensional photonic crystal
2. Two dimensional photonic crystal
Photonic crystal for visible wavelengths...
3. Photonic crystal for visible wavelengths...
Two dimensional photonic crystal
4. Two dimensional photonic crystal
Overview of hexagonal lattice type photonic...
5. Overview of hexagonal lattice type photonic...
Bars of width near 100 nm
6. Bars of width near 100 nm
Fragment of hexagonal lattice type photonic...
7. Fragment of hexagonal lattice type photonic...
Two dimensional photonic crystal
8. Two dimensional photonic crystal
Hexagonal lattice type photonic crystal in...
9. Hexagonal lattice type photonic crystal in...
Two dimensional photonic crystal
10. Two dimensional photonic crystal
Overview of hexagonal lattice type photonic...
11. Overview of hexagonal lattice type photonic...
Hexagonal lattice of holes.
12. Hexagonal lattice of holes.
Two dimensional photonic crystal
13. Two dimensional photonic crystal
Square lattice type two dimensional photonic...
14. Square lattice type two dimensional photonic...
Hexagonal lattice type photonic crystal in...
15. Hexagonal lattice type photonic crystal in...
Fragment of hexagonal lattice type photonic...
16. Fragment of hexagonal lattice type photonic...
Real fabricated Si<sub>3</sub>N<sub>4</sub>...
17. Real fabricated Si3N4...
Real fabricated Si<sub>3</sub>N<sub>4</sub>...
18. Real fabricated Si3N4...
Photonic crystals with introduced lattice defects
19. Photonic crystals with introduced lattice defects
                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                   
 
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