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Q&A item.

Q&A item

Q&A: Exposure, Development

Q: What type of resist used in the application.?
What kinds of photo resist we can use in this application?
A: You can use any resist sensitive to electron irradiation, positive or negative. The most common positive resist PMMA allows to produce structures with a resolution of 40 - 50 nm. For some applications, users may use two resist layers with different properties to achieve better resolution. Typically, your application dictates choice of the resist.
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