Q&A: Proximity Correction. Simulation of Development
We are looking for proximity correction software for our 100 kV e-beam lithography system. Could your software be used for proximity correction at 100 kV?
Yes, our proximity correction software can be used at high-voltage lithography systems. We did the proximity data correction for 100 kV machine and get reasonable result. The only task is to transfer proximity corrected data to your system. The common way is to export data from NanoMaker to GDSII file format and then transfer data from GDSII file to your EBL system format by a special software.