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Q&A item.

Q&A item

Q&A: Proximity Correction. Simulation of Development

Q: My structure is very big and contains references to other structures. What is the recommended way to start the proximity correction in this case?
A:
  1. First of all ungroup your structure and save the result to file. To do this, select all elements and start ungrouping by Edit->Ungroup command. It takes some time to ungroup and save ungrouped data because of the file size, so be patient please while saving.
  2. Before starting the proximity correction procedure cut your structure by 100 um grid to make the correction easier. To that end, go to Edit->Structure... dialogue. Select your structure from list and press Modify... button to open Modify Structure dialogue. Check the Allow Divide by Grid check box and enter 100 um for Grid Size parameter. Press Ok button and wait for the cutting procedure. Save the intermediate data to file again. Now your data are ready for correction procedure.
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