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Yes, we did many installation on FE-SEMs. One of those is LEO 1560 Schottky field emission SEM at Bessy, which is mentioned at Examples of Use section. Among of new machines were JEOL JSM 7001 F and FEI Quanta 600 F.
Besides we did NanoMaker installations on old FE-SEM with cold cathodes also. Among of them: JEOL JSM 6400 F, HITACHI S-800, Hitachi S-2500 and others. Of course, we know about beam current stability problems for such type machines.
From NanoMaker installation point of view there is no big difference between FE and non-FE SEM. So this is standard installation procedure depending on vendor/SEM model.
Of course, Schottky field emission SEM is preferable for e-beam lithography, but it also more consuming. |
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