NanoMaker Pattern Generation System for SEM and FIB Direct Write Lithography

Q&A: Installation

Q:	What information do you need to hook into our SEM for the complete NanoMaker system? What information do you need from us to hook into our SEM for the complete NanoMaker system? Do you have a checklist that you typically run through?

A:	To start the hooking into a new for us SEM, first of all, we need a description of External Scan Interface. We can ask you to provide us with documents that describes the connection of external systems (like EDX or similar) to SEM's External Scan Interface of your SEM. We need to know: altitudes of all external signals; impedances; bandwidth; type of connectors; pin's connection diagrams; position of connectors and distances between them and so on. cable drawings can be useful also. Particularly we are interesting in next signals: XY scan control inputs; Video signal output in external scanning mode; switching ON/OFF external scan; input for fast beam blanking in column. If SEM is equipped with motorized stage and customer is interesting to use it for lithography tasks we will need the description of external stage control protocol. For more requirements for installation please look at our Checklist.
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