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Q&A item.

Q&A item

Q&A: General

Q: What could be the minimum feature size in resist?
A: The minimum feature size could be close or large then 2 x Alpha, where Alpha is measured or estimated proximity function parameter, which depends on primary beam diameter, accelerating voltage, resist material and thickness and etc. In brief, if you will have 5 nm beam at 30 kV of accelerating voltage then in 100 nm thick PMMA resist you can get 30 nm lines.
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