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Q&A item
Q&A: General
| Q: | What could be the minimum feature size in resist? |
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| A: | The minimum feature size could be close or large then 2 x Alpha, where Alpha is measured or estimated proximity function parameter, which depends on primary beam diameter, accelerating voltage, resist material and thickness and etc. In brief, if you will have 5 nm beam at 30 kV of accelerating voltage then in 100 nm thick PMMA resist you can get 30 nm lines. |
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